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- Renesas to integrate Centrotherm’s new-generation horizontal furnaces into their 300mm wafer production line
Renesas to integrate Centrotherm’s new-generation horizontal furnaces into their 300mm wafer production line
• Renesas will integrate two of Centrotherm’s new-generation horizontal furnaces into their 300mm wafer production line in Kofu, Japan.• In 2024, Renesas will start producing its new generation IGBTs at the Kofu fab, including transistors for the next generation of inverters for electric vehicles.
They are the first manufacturer in Japan to use this fully automated, high-throughput production solution in mass production.
The c.HORICOO 300 is designed for oxidation and annealing processes on 300 mm silicon wafers. The system has fully automated wafer and boat handling and offers up to a 50% reduction in total cost of ownership compared to vertical furnace solutions.
Renesas plans to start production of its new generation IGBTs at its Kofu fab in 2024. The transistors produced here will be used for the next generation of inverters for electric vehicles, which are expected to achieve significant savings in battery power and thereby increase the driving range.
Senior Director of Power Device Project Office at Renesas, Kojiro Horita stated that “The c.HORICOO 300 is an important component for the expansion of our power semiconductor fab for 300-mm wafers. centrotherm is one of the leading suppliers of thermal process technology for the semiconductor industry, and we look forward to deepening our relationship as well as collaborating in the coming years.”